Scanning electron microscopy is a fast imaging technique that offers high resolutions and excellent depth of field.

Scanning Electron Microscopy (SEM) is a rapid, high resolution imaging technique. A SEM consists of an electron beam that scans the surface under study and a detector that collects the signal (secondary electrons, X rays and backscattered electrons) resulting from the interaction between the incident electrons and the surface. For a morphological study, the secondary electrons emitted are used to reconstruct the image. The tri-dimensional image then enables one to examine deposits or microsolders.

The X-ray spectrometer (EDS) gives the elemental composition of a zone as small as a few nm, using the same incident beam as the SEM but, analyzing the X rays emitted by the surface, whose energy is characteristic of each element.





-Fast, well-known and relatively inexpensive analysis
-Imaging and basic chemical analysis in one instrument


-Biological and insulating samples can be problematic
-Analysis performed in a vacuum (wet or degassing samples cannot be analysed)

Lateral resolution : 2-5 nm

Manufacturer: Hitachi

Model: S-4700 (émetteur à effet de champ (cold FEG ))

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