The GCM possesses a Tencor instrument to carry out intrinsic and thermal stress measurements for stresses between 0 and 20 GPa and temperatures between 20 and 900 °C. This apparatus measures the radius of curvature of circular substrates (prior to and after deposition) by laser interferometry. The stress values are then calculated from Stoney’s formula, knowing the thicknesses of the deposit and the substrate, as well as their respective Young’s moduli and Poisson coefficients.
-Measure thin film intrinsic stress
-Determine thermal stress in coatings
Force : 0 – 20 GPa
Manufacturer : Tencor
Model : Flexus 2900