Description
In a Auger spectroscope, an electron beam irradiates the surface under study and ejects an electron from a lower electronic layer. In order for the excited atom to go back to equilibrium, an electron from a higher electronic layer moves to a lower electronic layer, transferring the excessive energy to an Auger electron that is emitted by the atom. The electrons are characteristic of the element from which they were emitted, and their intensity if related to the elemental concentration. AES offers a good depth resolution to analyse small surfaces. Auger Electron Spectroscopy has numerous applications for defect and particle analysis, in a wide array of fields such as microelectronics, biomedical and pharmaceutical industries.
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Uses
- Thin film composition analysis
- Defect analysis
- Surface analysis
- Depth profile composition
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Technical specifications
| Elements detected : |
Lithium - uranium |
| Resolution / sensitivity : |
0.1 – 1 at% |
| Depth resolution : |
2- 20 nm profil en profondeur, 3 nm surface |
| Lateral resolution : |
~ 10 nm |
| Other characteristics : |
EBSD-UHV, preparation chamber, imaging during heating, ion sputtering |
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| Manufacturer : |
Omicron |
| Model : |
Nanotechnology |
