Cathodic arc deposition

Description

Cathodic arc deposition is a physical vapor deposition technique using an electric arc to vaporize the cathode (target). The vaporized material then condenses onto a substrate, forming a thin layer. Cathodic arc deposition is used for a wide range of materials: metals, ceramics and composites.

It has proved effective, in particular, for the deposition of hard layers, used to protect the surfaces of cutting tools. This method is also widely used to deposit DLC (diamond-like carbon) coatings.

Uses

  • Hard film deposition
  • Diamond-like carbon coating deposition
  • Decorative coating deposition

Technical specifications

Diameter of the sample holder: 8 inches
Base pressure: 5 x 10-6 torr
Available gases: Ar, N2, O2
Deposition rate: 1 - 10 nm/s
Control of the thickness: 5%
   
Manufacturer : Hauzer