E-beam evaporator

Description

The electron-beam evaporator is used to deposit metals and dielectrics. It can deposit 6 materials successively while the thickness is precisely controlled with a microbalance. It is also possible to replace the materials after each deposition. The short distance between the crucible and the sample holder provides a high deposition rate, at the expense of uniformity.

Uses

  • Deposition of metals and dielectrics on small samples

Technical specifications

Substrates : Any except plastics and photoresins
Sample holder : 4 in. diameter
Base pressure : 1x10-6 torr
Pumping time : 1h
Crucible – sample holder distance : 10 in
Number of crucibles : 6
Volume of crucibles : 1 cm3
Deposition rate : 1 - 10 Angströms / s
   
Manufacturer : Edwards