Description

Heavy ions of high energy (typically cobalt ions at 50 MeV) collide with a sample. Light atoms (H, He, C, O, etc) are ejected from the sample and collected by a solid-state detector. From the ejected atoms energy spectrum, one can deduct the depth composition profile of the sample. ERD is a quantitative and non-destructive method, mostly used for depth profiling. It is one of the few methods that can measure hydrogen concentrations.

Uses Thin film composition Depth profile composition Measure atomic concentrations

Technical specifications

Elements detected :	Hydrogen - uranium
Resolution / sensitivity :	0.1 – 1 at%
Depth resolution :	10 nm
Lateral resolution :	2 mm
Model :	Accelerator Tandem 6 MV