Description

Dual ion beam sputtering (DIBS) is a system for quality industrial coatings used for the creation of optical filters with exceptional accuracy and uniformity. This device is intended for demanding applications (e.g., telecommunications), and permits very fine control of various deposition parameters. Through the simultaneous use of two ion beams, it is possible to independently control the deposition rate and the structural properties of the layers. Several types of depositions can be manufactured by this unit, including astronomical and decorative filters, and security devices.

Uses Optical coating deposition Optical filter deposition

Technical specifications

Materials:	Ta2O5, SiO2, Nb2O5, Ta, N
Number of Targets:	3
Maximum number of substrates in the chamber:	9
Available gases:	Ar, O2, N2, He
Substrate temperature:	25 – 250 °C
Manufacturer :	Veeco-Ion Tech
Model :	Spector