Description
The mass spectrometer EQP500 of Hiden, installed on a plasma chamber, can characterize plasmas and residual contaminants. |
Uses
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Technical specifications
| Mass range: | 1-500 amu |
| Ion energy: | 0-1000 eV |
| Energy resolution: | 0.25 eV |
| Gating mode: | 1 microsecond temporal resolution |
| Manufacturer : | Hiden |
| Model : | EQP500 |