Peter, Yves-Alain 
Professor
Engineering Physics Department, École Polytechnique

	Phone:	514-340-4711 #3100
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	Address :	room C-567
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Research interests

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Design, fabrication and characterization of optical micro and nano systems. Optical MicroElectro Mechanical Systems (OMEMS) are multidisciplinary by essence. Their optical, electrostatic, mechanical design is based on analytical analysis and numerical simulations. The fabrication is based on micro and nano machining of silicon, using thin film layer deposition as well as dry (plasma) and wet etching. Nanofabrication of photonic crystals coupled with mobile MEMS devices, open the path to novel tunable nanophotonic devices. Applications of MEMS and NEMS are numerous: pressure sensors, accelerometers, inkjet printer heads, projection displays, astronomical telescopes (adaptive mirrors) as well as optical telecommunication and biology.