Description

Ion channelling is an analytical technique that relies on the properties of a monocrystal. Like RBS, ion channelling studies the behaviour of light ions backscattered from the surface under analysis. In particular, we know that the number of backscattered ions decreases drastically when the incident ion beam is aligned with the axial direction of a monocrystal. This method can thus evaluate a crystal quality as a function of depth or determine damages to the crystalline structure of a material.

Uses Analyse the quality of a crystal Measure defects in a crystal Depth profiling of damages to the crystalline structure

Technical specifications

Depth resolution :	1 at %
Depth resolution :	5 nm
Lateral resolution :	2 mm
Model :	Tandetron 1.7 MV accelerator