Mask aligner

Description

The Karl Suss MA-4 has been designed for high-accuracy photolithography in a lab environment. It can handle masks up to 5 inches in diameter, of regular or irregular shapes.

Uses

  • Photolithography
  • Exposition of various resins

Technical specifications

Alignment of masks : 4 inches
Alignment of masks : 4 inches
Contact modes : 5 (hard vacuum to proximity)
Lamp : 350W Hg
Optic : UV 400 (lines 436 – 405 – 365 nm)
Insolation : Power or constant intensity
Alignment : FAV/FAR infrared
   
Manufacturer : Karl Suss
Model : MA-4