Chemical analyses
- Time of Flight Secondary Ion Mass Spectroscopy (TOF-SIMS)
- X-ray Photoelectron Spectroscopy (XPS)
- Fourier Transform Infrared Spectroscopy (FTIR)
- Raman Microspectroscopy
- Auger Electron Spectroscopy (AES)
- Rutherford Backscattering (RBS)
- Elastic Recoil Detection (ERD)
Microscopy
- Atomic Force Microscopy (AFM)
- Dual beam Focused Ion Beam / Scanning Electron Microscopy
- Scanning Electron Microscopy (SEM)
- Optical Microscopes
Mechanical testing
- Profilometry
- Microhardness
- Microscratch testing
- Nano-indentation
- Tribometry
- Slip-peel tester
- Stress measurement
Other techniques
- Ellipsometry
- Absorption spectroscopy
- Spectrophotometry
- Surface plasmon resonance refractometry
- Photoluminescence (PL) and excitation photoluminescence
- Contact angle measurements
- Nuclear Reaction Analysis (NRA)
- Ion channelling
- Medium Energy Ion Scattering (MEIS)
- Brewster Angle Microscopy / Ellipsometric imaging
- Electron Beam Scattering Diffraction (EBSD-UHV)
- Four point probe
