Description
MEIS is a variation of Rutherford Backscattering (RBS), with better resolutions of the angle and the depth. The main difference between the two techniques is that the incident ions in MEIS are less energetic than those in RBS. Also, an electrostatic analyzer usually replaces the solid-state detector. This technique is ideal to obtain concentration depth profiles or to characterize the atomic structure of the surface.
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Uses
- Determine the geometry of the first atomic layers
- Depth profiling of the first layers
- Quantitative chemical analysis of coatings
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Technical specifications
| Elements detected : |
carbon to uranium |
| Resolution / sensitivity : |
1 at % |
| Depth resolution : |
0.3 nm |
| Lateral resolution : |
2 mm |
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| Model : |
200 kV accelerator |
