Photolithography
Thin Film Deposition
- Sputtering and e-beam evaporation system
- Magnetron sputterer
- E-beam evaporator
- ECR-PECVD
- High power pulsed magnetron sputtering
- Cathodic arc deposition
- Dual ion beam sputtering (DIBS)
- Plasma enhanced chemical vapor deposition (PECVD)
- Aluminum thermal evaporator
- Gold thermal evaporator
- Parylene deposition system
Etching
- Deep Reactive Ion Etching (DRIE-ICP)
- Reactive Ion Etching (RIE)
- Focused Ion Beam (FIB)
- Wet etching / wet bench