The microfabrication lab (LMF) offers, to the academic and the industrial sector, a large cleanroom in order to perform research and prototyping work. Main fields are semiconductors, microfluidic and MEMS (Micro Electro Mechanical System). Most of the installations and equipment are able to handle small silicon, glass, III-V materials, or other substrate pieces to full 6 inch wafers. The laboratory is equipped to handle most of the common microfabrication steps: spin-coating, photolithography, e-beam lithography, metal and material deposition, chemical and plasma etch, metrology and inspection, bonding, wet chemistry and dicing.
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