Groupe de recherche en physique et technologie des couches minces (GCM)

Parylene deposition system

Description

The PDS 2010 of Specialty Coating Systems has been designed for precise and repeatable depositions. The system features a control panel that shows the critical parameters of the process. This compact unit is ideal for Parylene deposition on printed circuits, electronic sensors, medical components and many other substrates.

Uses

  • Conformal Parylene deposition

Technical specifications

Samples : wafers up to 6 inches in diameter
   
Manufacturer : Specialty Coating Systems
Model : PDS 2010