Profilometry

Description

The profilometer is a high accuracy instrument used for topographical and surface roughness measurements. A stylus gently scans the surface, while the vertical movement is monitored continuously. Veeco Dektak 150 profilometer offers a high vertical resolution of a few angstroms, with a maximum vertical displacement of 1 mm. It is perfect for analyzing surfaces with steep hills and deep holes.

Uses

  • Surface topography in 2D and 3D
  • Roughness measurement
  • Stress measurement in thin films (profile prior to deposition is necessary)

Technical specifications

Vertical resolution : 1 angstrom max (on the 6.55 µm scale)
Vertical displacement : 1 mm max
Lateral resolution : <0.1% (on a 55 mm scan)
   
Manufacturer : Veeco
Model : Dektak 150