Rates for academic users
Download the rates in PDF.
Microfabrication |
||
|---|---|---|
| Without operator * | With operator * | |
| DRIE-ICP, FIB | 50$/h | 90$/h |
| Photolithography, sputtering, e-beam | 30$/h | 70$/ |
| RIE, MEB | 30$/h | 70$/ |
| Other equipment | 15$/h | 55$/h |
The maximum fee for an academic user without operator is 600$/month
(800$ if the FIB or DRIE-ICP is used).
Materials analysis |
||
|---|---|---|
| Without operator * | With operator * | |
| XPS | 35$/h | 75$/h |
| TOF-SIMS | 50$/h | 90$/ |
| FTIR, Raman, AFM | 20$/h | 45$/ |
| Contact angles | 15$/h | 55$/h |
| Ion implantation | 50$/h | 75$/h |
| ERD | - | 300$/sample |
| RBS | - | 50$/sample |
| Ellipsometer | 35$/h | 70$/h |
| Spectrophotometer | 30$/h | 65$/h |
| Microscratch (MST) | 30$/h | 65$/h |
| Triboindenter | - | 70$/h |
Notes
- The operators are available from 8h to 17h from Monday to Friday.
- Autonomous access to instruments is conditional to extensive training and authorization from the GCM personnel. Training session is billed at 50% off the regular fees.
- All material and furniture are in supplement.
- A gowning fee of 20$/week is applied for clean room usage.
- Reduced rates are available for equipment use during night or weekends.
- For projects requiring an intensive use of some equipment, reduced rates can be negotiated, in particular for projects that will allow the development of new techniques.
* Excluding the university indirect costs of 15%.