Description
Scanning Electron Microscopy (SEM) is a rapid, high resolution imaging technique. A SEM consists of an electron beam that scans the surface under study and a detector that collects the signal (secondary electrons, X rays and backscattered electrons) resulting from the interaction between the incident electrons and the surface. For a morphological study, the secondary electrons emitted are used to reconstruct the image. The tri-dimensional image then enables one to examine deposits or microsolders.The X-ray spectrometer (EDS) gives the elemental composition of a zone as small as a few nm, using the same incident beam as the SEM but, analyzing the X rays emitted by the surface, whose energy is characteristic of each element.
Uses
- Imaging and elemental analysis of small regions
- Identify and map defects
Technical specifications
| Lateral Resolution : | 2-5 nm |
| Other characteristics : | Imaging |
| Manufacturer : | Philips |
| Model : | XL-20 (tungsten filament) |
| Manufacturer : | Hitachi |
| Model : | S-4700 (cold field emission gun) |
| Manufacturer : | FEI |
| Model : | DB 235 |
