In carrying out several innovative projects, the GCM has developed an enviable know-how in microfabrication, thin film deposition and micro/nanosystems prototyping. The GCM laboratories are equipped with the latest equipment to manufacture microstructures with a great diversity of materials and substrates, including silicon wafers, glass, ceramics, alloys, metals, etc. Our main areas of expertise are:

• Design of microelectromechanical systems (MEMS)
• Printed circuit modification
• Microsystem prototyping
• Fabrication of optical cavities
• Design and fabrication of sensors
• Anti-wear and anti-corrosion coatings
• Anti-reflection coatings and optical filters
• Microfluidics

Our qualified personnel will be pleased to make your project a success. You can see here the list of equipment.

Thin Film Deposition E-beam evaporator PECVD Magnetron sputterer Thermal evaporators

Photolithography Mask aligner Positive and negative resins Back-end alignment (with infrared)

Etching Deep Reactive Ion Etching (DRIE) Reactive Ion Etching (RIE) Anisotropic Etching Focused Ion Beam Wet Etching

Custom Coatings Anti-corrosion coatings Anti-wear coatings Optical filters Anti-reflection coatings

See the full list of equipment