X-ray photoelectron spectroscopy (XPS)

Description

XPS, also known as Electron Spectroscopy for Chemical Analysis (ESCA), gives the elemental composition, the electronic and chemical state of elements found in the first 1 to 10 nm from the sample surface. This ultra high vacuum technique measures the photoelectrons emitted from the sample after it has been irradiated by magnesium or aluminum x-rays, as described by Einstein’s photoelectric effect.

Uses

  • Quantitative and non destructive surface analysis of organic and inorganic materials
  • Identification of the chemical species present
  • Contaminant identification

Technical specifications

Elements detected : Lithium - uranium
Resolution / sensitivity : 0.1 – 1 at%
Depth resolution : 1 – 10 nm
Lateral resolution : 250 µm – 2 mm
Other characteristics : Mapping, depth profiling, T = -196 – 600 °C, Preparation and deposition chamber
   
Manufacturer : VG Scientific
Model : ESCALAB 3 MKII
   
Manufacturer : Kratos
Model : Axis Ultra